EPMA analysis
Supports 100×100mm size! Wide-range mapping is possible due to stage movement.
EPMA analysis has good energy resolution and detection sensitivity, and is particularly excellent for quantitative analysis of trace components and map analysis. It can accommodate sizes of 100×100 mm, allowing for the acquisition of extensive maps. In the example of foreign substance analysis on indium-tin oxide thin films, it showed better energy resolution, detection limits, and PB ratios compared to SEM-EDX. Additionally, it enables the detection of trace elements and analyses that are difficult to perform with SEM-EDX. 【Features】 ■ Good energy resolution and detection sensitivity ■ Particularly excels in quantitative analysis of trace components and map analysis ■ Wide-ranging mapping possible due to movable stage ■ Can accommodate sizes of 100×100 mm *For more details, please refer to the PDF document or feel free to contact us.
- Company：アイテス
- Price：Other
